NikonPlanet.com

October 13, 2011

Nikon Corporation (Makoto Kimura, President, Chiyoda-ku, Tokyo) today announced the release of three scanners, FX-66S, FX-76S and FX-86S, which are new exposure equipment for liquid crystal displays (LCDs) with a multi-lens system enabling productivity and performance surpassing existing systems.

Main Characteristics and Specifications of FX-66S, FX-76S and FX-86S

• High Throughput
  FX-66S (1300 mm x 1500 mm):
  19,000 panels/hr (4-inch panel), 6,600 panels/hr (7-inch panel)
  FX-76S (1950 mm x 2250 mm):
  514 panels/hr (42-inch wide panel), 385 panels/hr (48-inch wide panel)
  FX-86S (2200 mm x 2500 mm):
  496 panels/hr (46-inch wide panel), 372 panels/hr (52-inch wide panel)
• Improved Exposure Performance

  FX-66S/76S/86S adopted the sophisticated calibration feature originally developed for the 10th generation LCD scanner FX-101S, achieving a more stable exposure performance.

• Multi-lens System

  Nikon’s proprietary multi-lens system comprising multiple projection lenses is incorporated.
  While ensuring a wide exposure field, a high resolution of 3 ?m or less (L/S) is achieved in a more stable manner by introducing a new technology in the lens production method.

• Main Specifications

• The information is current as of the date of publication. It is subject to change without notice.

Article source: http://www.nikon.com/news/2011/1013_fx-66s_01.htm

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